• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    This pump (1) comprises a pump body (3) which defines a circulation space (4) of fluid in a flow direction (A) from an inlet (52) of the circulation space to an orifice output (54) of the circulation space. The pump (1) comprises a membrane (6) which is maintained in the circulation space (4) substantially parallel to the flow direction (A), as well as coupling means (8) between the membrane (6) and an actuating device (9) able to vibrate the membrane (6). The membrane (6) comprises a protective coating made of a polymer organic matrix material having a Young's modulus between 100 MPa and 10 GPa, or is made of a polymer organic matrix material having a Young's modulus of between 100 MPa and 10 GPa.
    公开号:FR3021074A1
    申请号:FR1454290
    申请日:2014-05-14
    公开日:2015-11-20
    发明作者:Alban Letailleur；Roland Lucotte；Julien Benoit
    申请人:Saint Gobain Performance Plastics France；
    IPC主号:
    专利说明:

    [0001] The present invention relates to a pump for the displacement of fluids, in particular well suited for applications in which the fluids to be displaced are fluids that must not be contaminated or deteriorated, such as biological fluids or fluids. high purity, or in which the fluids to be moved are aggressive fluids, such as those used for the manufacture of semiconductor components. To move a solution or a fluid suspension, it is known to use a centrifugal pump comprising a turbine placed in a pump body. The turbine is conventionally actuated by means of a shaft which passes to the outside of the pump body and which is rotated by an external motor. A disadvantage of such a centrifugal pump is that there is a risk of contamination or leakage at the bearing through which the drive shaft of the turbine passes. In addition, the rotation of the turbine generates in operation shear stresses in the fluid, which are penalizing in the case of fragile fluids, including biological fluids. Another disadvantage of such a centrifugal pump is that it is not suitable for moving aggressive fluids, which tend to destroy the mechanical bearings. As examples of aggressive fluids, mention may be made of the suspensions used in CMP (ChemicalMechanical Planarization) polishing processes for planarizing the surface of semiconductor components. These suspensions may include very fine particles that tend to attack the bearings mechanically.
    [0002] It is these drawbacks that the invention intends to remedy more particularly by proposing a pump which ensures efficient fluid displacement, both for small volumes and for large volumes of fluid, this pump making it possible to obtain a flow rate of fluid stable over time while offering the possibility of modulating the flow of fluid over a wide range of flows, the structure of the pump being further adapted to limit the risk of contamination or deterioration of the fluid to be displaced, and allow a use with aggressive fluids.
    [0003] To this end, the subject of the invention is a pump comprising a pump body which defines a fluid circulation space in a flow direction from an inlet of the circulation space to an outlet orifice of the circulation space, the pump comprising: a membrane which is maintained in the circulation space substantially parallel to the direction of circulation, and coupling means between the membrane and an actuating device able to vibrate the membrane, in particular substantially perpendicular to the direction of flow, characterized in that either the membrane comprises a protective coating made of a polymer organic matrix material having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, either the membrane consists of a polymer organic matrix material having a Young's modulus between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GP at. Throughout this application, the numerical values of Young's modulus are given at 23 ° C. In the context of the invention, the Young's modulus of the material constituting the organic polymer matrix of the protective coating or of the membrane is measured according to the ISO 37: 2011 standard.
    [0004] Within the meaning of the invention, the term "protective coating" means an outer portion of the membrane which is intended to be in contact with the fluid during operation of the pump, it being understood that the remainder of the membrane, apart from the protective coating, is configured not to be in contact with the fluid. In the context of the invention, a fluid is a deformable medium capable of being displaced, such as a liquid, a gas, a gel, a paste, a powder, a suspension, a dispersion, an emulsion, or a mixture of these. According to the invention, the membrane or the protective coating of the membrane may consist entirely of a polymeric organic material having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, or, alternatively, the membrane or the protective coating of the membrane may consist of a composite material comprising the organic polymer matrix having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, and a reinforcement, in particular a fibrous reinforcement, woven or non-woven, for example based on glass fibers. A vibrating diaphragm pump as described above avoids the presence of bearings and mechanical bearings in the pump casing, which reduces the risk of contamination and leakage. In addition, such a diaphragm pump generates few shear stresses in the displaced fluid, which preserves the integrity of the fluid components, while ensuring a high level of fluid displacement. It is possible with such a pump to modulate the fluid flow over a wide range, especially ranging from 0.1 L / min to 100 L / min, but also, for a given fluid flow rate, to obtain a good stability of the fluid flow over time. Another advantage of a vibrating membrane pump is that it is self-priming, i.e. the pump does not need to be initially filled with the fluid to be displaced to operate. In practice, the pump can pump a certain amount of air, thus creating a vacuum in the upstream circuit, which allows the fluid to arrive in the circulation space. The inventors have selected, as the material constituting the membrane or a protective coating of the membrane, a polymeric organic material having a relatively high Young's modulus, of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, instead of an elastomer such as silicone or polyurethane elastomers which have Young's moduli of the order of 1 to 10 MPa. It is the merit of the inventors to have found that a conventional geometry membrane made of a polymer organic matrix material having a Young's modulus of between 100 MPa and 10 GPa or comprising a protective coating made of an organic matrix material a polymer having a Young's modulus of between 100 MPa and 10 GPa, is not only able to provide a fluid propulsion function when integrated in a vibrating membrane pump, but also able to withstand degradation, especially when the pump is used to move a mechanically aggressive fluid, such as the suspensions used in CMP polishing processes.
    [0005] Advantageously, the organic polymer materials having a Young's modulus of between 100 MPa and 10 GPa are also more chemically stable than the silicone or polyurethane elastomers, and less likely to change chemically in contact with fluids circulating in the pump. According to one aspect of the invention, the actuating device is configured to alternately generate, at one end of the membrane located in the vicinity of the entrance orifice of the circulation space, an excitation force substantially perpendicular to the direction of circulation.
    [0006] According to the invention, the membrane is arranged so that in response to the application of an alternating excitation force at one end of the membrane, in a direction of excitation substantially perpendicular to the membrane, while the membrane extends parallel to the direction of flow, at least one undulation of the membrane appears and propagates along the membrane from its end subjected to the excitation force to another end of the membrane. Thus, the membrane may constitute a support for the wave displacement from its end subjected to the excitation force towards its other end. The displacement of these waves is accompanied by a forced damping in the fluid circulation space. A transfer of mechanical energy between the membrane and the fluid is thus established in the form of a pressure gradient and a fluid flow. In a preferred embodiment, the excitation of the membrane is performed at one of the eigenfrequencies of the membrane, in particular the first natural frequency of the membrane. According to an advantageous characteristic, in order to avoid localized pressure effects in the fluid, the excitation frequency of the membrane has a value in the range from 20 Hz to 300 Hz, preferably from 40 Hz to 150 Hz .
    [0007] At rest, the membrane is simply held on its periphery. During the actuation of the membrane, it sees its surface increase with the formation of the wave, which results in a tension of the membrane in operation, due to the holding periphery of the membrane. The periphery of the membrane may be engaged with a peripheral rigid support, this support exerting at the periphery of the membrane forces to force the return of the membrane in an extension plane of the support. In the case of a discoidal diaphragm, the support may in particular be a ring, which exerts radiating forces at the periphery of the membrane. According to an advantageous characteristic, the organic polymer matrix of the membrane or protective coating of the membrane is made of fluoropolymer. In the context of the invention, the term "fluoropolymer" denotes any polymer having in its chain at least one monomer chosen from compounds containing a vinyl group capable of polymerizing, or of propagating a polymerization reaction, and which contains, directly attached to this vinyl group, at least one fluorine atom, a fluoroalkyl group or a fluoroalkoxy group.
    [0008] As an example of a monomer, mention may be made of vinyl fluoride; vinylidene fluoride (VF2); trifluoroethylene (VF3); chlorotrifluoroethylene (CTFE); 1,2-difluoroethylene; tetrafluoroethylene (TFE); hexafluoropropylene (HFP); perfluoro (alkyl vinyl) ethers, such as perfluoro (methyl vinyl) ether (PMVE), perfluoro (ethyl vinyl) ether (PEVE) and perfluoro (propyl vinyl) ether (PPVE); perfluoro (1,3-dioxole); perfluoro (2,2-dimethyl-1,3-dioxole) (DP); the product of formula CF2 = CFOCF2CF (CF3) OCF2CF2X wherein X is 502F, CO2H, CH2OH, CH2OCN or CH2OPO3H; the product of formula CF2 = CFOCF2CF2S02F; the product of formula F (CF 2), - ICH 2 OCF = CF 2 wherein n is 1, 2, 3, 4 or 5; the product of formula R1CH2OCF = CF2 wherein R1 is hydrogen or F (CF2) z and z is 1, 2, 3 or 4; the product of formula R3OCF = CH2 wherein R3 is F (CF2) z- and z is 1, 2, 3 or 4; perfluorobutylethylene (PFBE); 3,3,3-trifluoropropene; 2-trifluoromethyl-3,3,3-trifluoro-1-propene. The fluoropolymer may be a homopolymer or a copolymer, it may also include non-fluorinated monomers such as ethylene. Advantageously, the fluorinated polymer is chosen from fluorinated ethylene-propylene (FEP), ethylenetetrafluoroethylene (ETFE), polytetrafluoroethyleneperfluoropropylvinylether (PFA), polytetrafluoroethylene-perfluoromethylvinylether (MFA), polytetrafluoroethylene (PTFE), poly (fluoride of vinylidene) (PVDF), ethylenechlorotrifluoroethylene (ECTFE), polychlorotrifluoroethylene (PCTFE), or a combination thereof. Preferably, the entire pump body is made of fluoropolymer, optionally reinforced with fibers, in particular glass fibers. Preferably, each seal of the pump is made of fluoropolymer. Fluoropolymers can eliminate any possibility of contamination, which is advantageous for high purity applications. Fluoropolymers also have the advantage of being resistant to chemicals, in particular acids such as sulfuric acid (H2SO4), hydrofluoric acid (HF) or phosphoric acid (H3PO4) which are used, in particular, for the manufacture of semiconductors. According to one aspect of the invention, the pump comprises a support, which is integral with the end of the membrane intended to be subjected to the excitation force and at least a portion of which passes sealingly towards the outside of the body pump, the actuating device being adapted to act on this part of the support so as to alternately generate the excitation force at the end of the membrane.
    [0009] In one embodiment, the support is made of a polymeric material distinct from the material constituting the membrane or protective coating of the membrane, in particular chosen from polycarbonate, polyphenylene sulphide (PPS), polypropylene, optionally reinforced with fibers, especially glass fibers. The membrane is then advantageously overmolded on the support, which saves time for assembling the pump, while improving the adhesion and coupling between the membrane and the support. In another embodiment, the support is made of the same polymer material as the organic polymer matrix of the membrane or protective coating of the membrane. The support is then advantageously formed in one piece with the membrane, in particular by molding.
    [0010] According to one aspect of the invention, the pump is integrally made of polymer material (s), optionally reinforced with fibers for the parts of the pump having a mechanical function, such as the support. By way of non-limiting example, the pump body may be made of polyolefin, polycarbonate or fluoropolymer such as PFA or PTFE; the support may be made of polycarbonate, polyphenylene sulphide (PPS) or polypropylene, optionally reinforced with glass fibers; the membrane may be made of PFA, which has a Young's modulus of the order of 500 to 600 MPa. Such a pump integrally made of polymer material (s) can limit the manufacturing cost and the weight of the pump. In addition, no metal part is in contact with the fluid or fluids to be displaced, which is particularly advantageous in the case of the displacement of aggressive fluids likely to attack metal materials or fluids sensitive to metallic pollution.
    [0011] Of course, several known membrane geometries are compatible with the invention. In one embodiment, the membrane may be in the shape of a substantially parallelepipedic blade and maintained in a circulation space delimited by two walls, preferably rigid, arranged facing the main surfaces of the membrane. An excitation force substantially perpendicular to the mean plane of the membrane can then be applied to an edge of the membrane located on the side of the entrance orifice of the circulation space, so that the deformation waves propagate towards the an opposite edge of the membrane located on the side of the outlet of the circulation space. In another embodiment, the membrane may be tubular in shape and maintained in a tubular circulation space with preferentially rigid walls. A radial and symmetrical excitation force distribution can then be applied to one end of the tubular membrane located on the inlet side of the circulation space, so that the deformation waves propagate towards the opposite end of the membrane located on the side of the outlet of the circulation space.
    [0012] In yet another embodiment, the membrane may be disk-shaped, or disc portion, and maintained in a circulation space defined by two walls, preferably rigid, arranged facing the main surfaces of the membrane. An excitation force substantially perpendicular to the mean plane of the membrane can then be applied to a first end of the membrane located on the inlet side of the circulation space, so that the deformation waves propagate. towards a second end of the membrane located on the side of the exit orifice of the circulation space. An advantage of this disc-shaped embodiment is that the retention of the membrane in the circulation space is simplified because the membrane is maintained only at its outer peripheral edge. According to a first variant of the disc-shaped embodiment, the first end of the membrane situated on the side of the inlet orifice, to which the excitation force is applied, is a central edge of the membrane, whereas the second end of the membrane located on the outlet port side is an outer peripheral edge of the membrane. This arrangement corresponds to a centrifugal configuration of the pump, in which the fluid flows from the center to the periphery of the membrane.
    [0013] According to a second variant of the disc-shaped embodiment, the first end of the membrane situated on the side of the inlet orifice, to which the excitation force is applied, is an external peripheral edge of the membrane, whereas the second end of the membrane on the outlet side is a central edge of the membrane. This arrangement corresponds to a centripetal configuration of the pump, in which the fluid flows from the periphery to the center of the membrane. This centripetal configuration generates an effect of concentration of energy, from the periphery to the center of the circulation space, which makes it possible to obtain pressure gradients compatible with those required in industrial applications. This centripetal configuration also makes it possible to work with smaller amplitudes of excitation at the outer peripheral edge of the membrane, and thus to limit the degradation of fragile fluids.
    [0014] In an advantageous embodiment, the pump body comprises two walls facing each other, which define the circulation space between them, the membrane being substantially disc-shaped and held in the circulation space. substantially parallel to the walls. Preferably, the or each inlet orifice then opens into the circulation space in the vicinity of the periphery of the membrane, while the or each outlet orifice opens into the circulation space in the vicinity of a central zone of the membrane, which corresponds to the centripetal configuration.
    [0015] Whatever the geometry of the membrane, the membrane and / or a support secured to one end of the membrane advantageously have orifices, so that the fluid can pass on both sides of the membrane in the space of circulation. It is thus possible to exploit the entire volume of the pump body to transfer the displacement energy of the fluid. In particular, in the discoidal geometry embodiment, the membrane and / or the support comprise at least one peripheral orifice and at least one central orifice. In one embodiment, the pump body comprises a first flange and a second flange which form two walls, preferably rigid, opposite one another defining between them the circulation space, the first flange comprising the orifices. entrance and exit of the circulation space. The second flange may include a drain port of the pump. The cross section of the circulation space of the pump according to the invention, taken perpendicular to the direction of flow, may be generally constant, increasing or decreasing from the inlet of the circulation space to the orifice exit from the circulation space. In particular, in the case of a discoidal diaphragm, the thickness of the circulation space may be generally constant, increasing or decreasing from the periphery of the membrane to a central zone of the membrane. A configuration in which the cross section of the circulation space is generally increasing from the inlet port to the outlet port provides a large fluid flow at the outlet port. A configuration in which the cross section of the circulation space is generally decreasing from the inlet port to the outlet port promotes wave propagation from the end subjected to the excitation force to the other end of the membrane.
    [0016] According to one aspect of the invention, the actuating device comprises at least one linear electromagnetic actuator powered by an alternating current. In a variant, the actuating device may comprise at least one mechanical actuator, for example a crank-handle actuator, powered by a variable speed geared motor.
    [0017] In one embodiment, the pump comprises at least one ferromagnetic element, which is housed in the pump body and forms a movable portion of the actuating device for vibrating the membrane. A winding is then provided around the pump body so as to induce a displacement of the ferromagnetic element inside the pump body.
    [0018] This configuration makes it possible to have a pump body completely closed. According to one aspect of the invention, the pump comprises at least one fluid flow sensor at the outlet of the pump, which is in retro-control connection with the actuating device, so as to maintain a constant fluid flow rate. Particularly advantageously, a diaphragm pump according to the invention makes it possible to control the fluid flow rate by adjusting the amplitude and / or the frequency of vibration of the membrane imposed with the aid of the actuating device. The invention also relates to a fluid displacement device comprising a high-flow distribution pump and a diaphragm pump as described above, wherein the diaphragm pump is connected to the outlet of the dispensing pump. The provision of a diaphragm pump according to the invention at the output of a high-flow dispensing pump makes it possible to obtain a smoothing of the fluid flow, or to gain precision over the quantity of fluid delivered. It also acts as a proportional valve and reduces fluid pressure. Finally, the subject of the invention is a mixing vessel comprising: a container intended to receive at least one fluid, and a pump as described above, the inlet and outlet ports of the pump body being in communication with the interior volume of the container. In an advantageous embodiment, the inlet and outlet ports of the pump body open into the container such that the fluid flows directly and without conduit between the container and the pump body. Preferably, the container is of flexible material, so that it can be flattened on itself when it is empty of contents, which limits the size of the container-mixer. Examples of flexible polymeric materials suitable for the container include, but are not limited to, polyethylene, polypropylene, polyvinylidene chloride (PVDC), nylon, ethylene-vinyl alcohol copolymer (EVOH), fluorinated polymers such as ethylene tetrafluoroethylene (ETFE), polyvinylidene fluoride (PVDF), fluorinated ethylene-propylene copolymers (FEP). The features and advantages of the invention will appear in the following description of an embodiment of a pump according to the invention, given solely by way of example and with reference to the appended drawings in which: Figure 1 is a perspective view partially broken away of a pump according to the invention; - Figure 2 is a cross section along the planes II-II of Figure 1; and FIG. 3 is a perspective view of the diaphragm and the support of the pump of FIGS. 1 and 2. FIGS. 1 and 2 show a pump 1 comprising a pump body 3 which defines in its interior volume a space 4 fluid circulation, wherein is maintained a deformable membrane 6 for the propulsion of fluid. The pump body 3 comprises two flanges, an upper flange 5 and a lower flange 7, which are assembled to one another at their periphery. In the assembled configuration of the pump body 3, a rigid wall 51 of the upper flange 5 is opposite a rigid wall 71 of the lower flange 7, so that the walls 51 and 71 delimit between them the circulation space 4. As visible in Figure 1, the circulation space 4 has a disk-like shape, as the membrane 6. The wall 51 of the upper flange 5 is pierced with a peripheral orifice 52 and a central orifice 54, which form respectively a fluid inlet orifice in the circulation space 4 and a fluid outlet orifice out of the circulation space 4. The fluid thus circulates in the circulation space 4 in a centripetal radial direction A, since the peripheral inlet orifice 52 towards the central outlet orifice 54. In practice, unrepresented fluid supply tubes may be connected to the orifices 52 and 54.
    [0019] According to the invention, the membrane 6 is made of a polymer material having a Young's modulus of between 100 MPa and 10 GPa, for example in this embodiment of PFA. The flanges 5 and 7 are also made of polymer material, for example in this polypropylene embodiment. The membrane 6 and the flanges 5 and 7 are advantageously obtained by molding, in particular by injection molding. The membrane 6 has an average plane P and is kept under tension in the circulation space 4 parallel to the direction A. An outer peripheral end 61 of the membrane 6 is fixed to a rigid support 8. The support 8 comprises an annular portion 80 and a plurality of circumferentially distributed circumferential lugs 81 projecting from the annular portion 80. The holder 8 is made of a polymeric material, for example in this polycarbonate embodiment. The support 8 is advantageously obtained by molding in one piece, in particular by injection molding. In addition, the membrane 6 is advantageously assembled with the support 8 by overmolding. In this embodiment, the membrane 6 has a central orifice 64, while the support 8 has a plurality of peripheral orifices 82. Thus, the fluid circulates in the circulation space 4 on both sides of the membrane. 6, that is to say both in the volume defined between the membrane 6 and the upper flange 5 and in the volume defined between the membrane 6 and the lower flange 7.
    [0020] As shown in FIGS. 1 and 2, the peripheral tabs 81 of the support 8 project outwardly from the pump body 3 through the orifices 78 of the lower flange 7. In this embodiment, the support 8 comprises six peripheral tabs 81 that pass through six orifices 78 of the lower flange 7. Seals 2 are provided in each orifice 78. By way of example, in this embodiment, the seals 2 are made of a fluorinated polymer such as PTFE, and secured to the legs 81 of the support 8 by any appropriate means, in particular by overmolding, welding, or latching. The peripheral tabs 81 of the support 8 are intended to be coupled to an actuating device 9 which, in this embodiment, comprises a plurality of linear electromagnetic actuators whose moving parts 91 are able to be secured to the peripheral tabs 81, for example by snapping into the inner volume of the peripheral tabs 81. In known manner, each actuator, when powered by an alternating current, produces an alternating displacement in translation of a movable part 91, which results from the appearance of forces of Laplace within the actuator. The moving parts 91 of the actuators are then able to print to the support 8 a translational movement in a direction B substantially perpendicular to the median plane P of the membrane 6. Thus, the actuating device 9 makes it possible to generate, alternatively, at the outer peripheral end 61 of the membrane 6, an excitation force F substantially perpendicular to the median plane P of the membrane 6. The constituent material and the dimensions of the support 8 are chosen so that the support 8 has sufficient rigidity to ensure that the excitation force F applied to the peripheral end 61 of the membrane 6 is substantially the same over the entire periphery of the membrane, even if the actuators act discretely at the tabs 81. Advantageously, to ensure good propagation of waves from the peripheral end 61 of the membrane 6 which is subjected to the excitation force F to the extr 1 of the membrane which delimits the central orifice 64, the membrane 6 has a thickness e decreasing from its peripheral end 61 towards its central orifice 64. The pump 1 described above which, according to the invention, comprises a membrane 6 made of PFA, which is a fluoropolymer having a Young's modulus of the order of 500 to 600 MPa, makes it possible to obtain efficient displacement of fluids, for both small and large volumes, and can be used to move mechanically and / or chemically aggressive fluids, such as fluids used for the manufacture of semiconductor components. In practice, the inventors have found that by replacing, in a diaphragm pump as described above, a silicone elastomer membrane with a PFA membrane, all the other characteristics of the pump and of the actuating device being Otherwise kept unchanged, one obtains with the PFA membrane a fluid flow of the order of that obtained with the silicone elastomer membrane. It has been observed that the reduction of the fluid flow rate for the PFA diaphragm pump with respect to the silicone elastomer diaphragm pump is, for the same diaphragm actuation frequency, within a range of up to 15%. the fluid flow obtained with the silicone elastomer membrane. These results can also be obtained when the membrane 6 has a layered structure, comprising: a protective coating made of a polymer organic matrix material having a Young's modulus between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, for example in PFA, and - at least one inner layer which, in assembled configuration of the pump, is protected by the protective coating with respect to a fluid passing through the circulation space 4, this inner layer may be made of a material other than the material constituting the protective coating. The inner layer of the membrane may in particular be made of a polymeric material having a Young's modulus much less than 100 MPa, such as a silicone or polyurethane elastomer. Advantageously, a pump according to the invention limits the shear stresses generated in the fluids, which makes it possible to avoid damage to their components. A pump according to the invention is thus applicable for the displacement of all types of fluids, including fragile fluids or charged particles, including biological or pharmaceutical fluids. A pump according to the invention is also well suited for the mixing of non-Newtonian fluids, for which it is desired to control shear, for example for the mixture of rheofluidifying or rheo-thickening fluids, or for the mixing of fluids liable to agglomerate irreversibly under the effect of shear. In addition, with a pump according to the invention, the risk of leakage and contamination are limited, especially due to the absence of bearings or mechanical bearings urged by a rotary member. A pump according to the invention also has a small footprint, in particular it is flatter than a centrifugal pump due to the smaller size of the membrane relative to a turbine. The invention is not limited to the examples described and shown.
    [0021] In particular, as mentioned above, the membrane of a pump according to the invention may be made of any organic polymer matrix material other than PFA, having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200. MPa and 2 GPa, especially in FEP or PTFE. The membrane of a pump according to the invention may also have a layered structure as mentioned above, comprising a protective coating made of a polymer organic matrix material having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, and a core formed by at least one inner layer which may be made of a material other than the material constituting the protective coating, in particular of a polymeric material having a Young's modulus of well below 100 MPa, to increase the elasticity of the membrane. The membrane of the pump may also have a geometry other than discoidal, including a geometry blade or tubular. In addition, a single face of the membrane can be used to move the fluid, which would be the case for example in the embodiment described above in the absence of the central orifice 64 and / or peripheral orifices 82 which allow the passage of the fluid on both sides of the membrane. In addition, in the previous embodiment, the pump may comprise a plurality of inlet orifices 52 distributed circumferentially on the periphery of the pump body, and a central outlet orifice 54. The pump may also include a nonreturn valve, for example at the outlet orifice 54, so as to ensure a metering pump function. According to another variant of the preceding embodiment, the support 8, on the one hand, and the membrane 6 or the protective coating of the membrane 6, on the other hand, may consist of the same organic polymeric matrix material having a module Young between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa. The support is then advantageously monobloc with the membrane and formed in one piece with it, in particular by molding. Whatever the relative configuration of the diaphragm and the support, monobloc or two separate parts, the fluid passage orifices on either side of the membrane in the circulation space, referenced 64 and 82 in the mode of previous embodiment, can be provided indifferently on the membrane or on the support. Moreover, other operating devices than the linear electromagnetic actuators described above are usable in the context of the invention. In particular, the structure of the electromagnetic actuators can be modified so that a coil is present around the pump body so as to induce a displacement of the movable portion of each actuator inside the pump body. This configuration makes it possible to have a completely closed pump body, without part 81, which passes to the outside of the pump body, which is particularly advantageous for sealing. Alternatively, as already mentioned, the electromagnetic actuators can also be replaced by other types of actuators, including mechanical actuators. It is also possible for the same pump to have a plurality of parallel membranes arranged to wave together in the circulation space under the effect of the excitation force F and arranged to force a flow of fluid through the space. flow from the inlet of the circulation space to the outlet of the circulation space.
    权利要求:
    Claims (15)
    [0001]
    REVENDICATIONS1. A pump (1) comprising a pump body (3) which defines a circulation space (4) of fluid in a flow direction (A) from an inlet (52) of the circulation space to an orifice outlet (54) of the circulation space, the pump (1) comprising: - a membrane (6) which is maintained in the circulation space (4) substantially parallel to the circulation direction (A), and - coupling means (8) between the membrane (6) and an actuating device (9) able to vibrate the membrane (6), characterized in that either the membrane (6) comprises a protective coating made of a material with organic polymer matrix having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa, ie the membrane (6) is made of a polymer organic matrix material having a Young's modulus of between 100 MPa and 10 GPa, preferably between 200 MPa and 2 GPa.
    [0002]
    2. Pump according to claim 1, characterized in that the organic polymer matrix of the membrane (6) or the protective coating of the membrane (6) is fluoropolymer.
    [0003]
    3. Pump according to any one of claims 1 or 2, characterized in that each seal (2) of the pump (1) is fluoropolymer.
    [0004]
    4. Pump according to any one of the preceding claims, characterized in that the pump (1) comprises a support (8), which is integral with one end (61) of the membrane (6) and at least a portion (81) passes sealingly outwardly of the pump body (3), the actuating device (9) being adapted to act on said part (81) of the support so as to engender alternately, to the end (61) of the membrane, an excitation force (F), preferably substantially perpendicular to the flow direction (A).
    [0005]
    5. Pump according to claim 4, characterized in that the support (8) is made of the same polymer material as the membrane (6) or the protective coating of the membrane (6).
    [0006]
    6. Pump according to any one of the preceding claims, characterized in that the pump (1) is integrally made of material (x) polymer (s), optionally reinforced (s) by fibers.
    [0007]
    7. Pump according to any one of the preceding claims, characterized in that the pump body (3) has two walls (51, 71) facing one another, which define between them the circulation space. (4), the membrane (6) being substantially disk-shaped and maintained in the circulation space (4) substantially parallel to the walls (51, 71).
    [0008]
    8. Pump according to claim 7, characterized in that each inlet (52) opens into the circulation space (4) in the vicinity of the periphery of the membrane (6), while each outlet orifice (54) ) opens into the circulation space (4) in the vicinity of a central zone of the membrane (6).
    [0009]
    9. Pump according to any one of claims 7 or 8, characterized in that the membrane (6) and / or a support (8) integral with the membrane (6) comprise at least one peripheral orifice (82) and at least a central orifice (64).
    [0010]
    10. Pump according to any one of the preceding claims, characterized in that the pump body (3) comprises a first flange (5) and a second flange (7) which form two walls (51, 71) facing the one of the other defining between them the circulation space (4), the first flange (5) having the inlet (52) and outlet (54).
    [0011]
    11. Pump according to any one of the preceding claims, characterized in that the actuating device (9) comprises at least one linear electromagnetic actuator fed by an alternating current.
    [0012]
    12. Pump according to any one of the preceding claims, characterized in that it comprises at least one ferromagnetic element, which is housed in the pump body (3) and which forms a movable part of the actuating device (9). .
    [0013]
    13. Pump according to any one of the preceding claims, characterized in that it comprises at least one fluid flow sensor which is in back-control connection with the actuating device (9).
    [0014]
    A fluid displacement device comprising a high flow rate delivery pump and a diaphragm pump (1) according to any one of the preceding claims, wherein the diaphragm pump (1) is connected at the outlet of the dispensing pump. .
    [0015]
    A mixing vessel comprising: a container for receiving at least one fluid, and - a pump (1) according to any one of claims 1 to 13, wherein the inlet (52) and outlet (54) orifices (54). ) of the pump body (3) are in communication with the interior volume of the container.
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    同族专利:
    公开号 | 公开日
    KR20160148647A|2016-12-26|
    TWI579461B|2017-04-21|
    TW201544703A|2015-12-01|
    CN106489026A|2017-03-08|
    IL248868D0|2017-01-31|
    JP2017516015A|2017-06-15|
    US20150330383A1|2015-11-19|
    FR3021074B1|2016-05-27|
    EP3143283A1|2017-03-22|
    WO2015173280A1|2015-11-19|
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    法律状态:
    2015-05-21| PLFP| Fee payment|Year of fee payment: 2 |
    2015-11-20| PLSC| Publication of the preliminary search report|Effective date: 20151120 |
    2016-05-19| PLFP| Fee payment|Year of fee payment: 3 |
    2017-05-24| PLFP| Fee payment|Year of fee payment: 4 |
    2018-05-22| PLFP| Fee payment|Year of fee payment: 5 |
    2020-02-14| ST| Notification of lapse|Effective date: 20200108 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1454290A|FR3021074B1|2014-05-14|2014-05-14|MEMBRANE PUMP|FR1454290A| FR3021074B1|2014-05-14|2014-05-14|MEMBRANE PUMP|
    TW104114503A| TWI579461B|2014-05-14|2015-05-06|Membrane pump|
    JP2016567234A| JP2017516015A|2014-05-14|2015-05-13|Membrane pump|
    KR1020167033088A| KR20160148647A|2014-05-14|2015-05-13|Membrane pump|
    CN201580035533.6A| CN106489026A|2014-05-14|2015-05-13|Membrane pump|
    US14/711,225| US20150330383A1|2014-05-14|2015-05-13|Membrane pump|
    EP15724200.9A| EP3143283A1|2014-05-14|2015-05-13|Membrane pump|
    PCT/EP2015/060542| WO2015173280A1|2014-05-14|2015-05-13|Membrane pump|
    IL248868A| IL248868D0|2014-05-14|2016-11-09|Membrane pump|
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